Localized immobilization of micro to nanometer sized biological recognition elements is currently an active field of research, in particular due to an increasing demand for miniaturized bioanalytical devices together with the call for parallel analysis of multiple analytes in small sample volumes. Surface probe microscopy techniques have attracted much attention for the site directed structuring of surfaces due to its simplicity and are increasingly used next to lithographic approaches. Scanning Electrochemical Microscope (SECM) is an electrochemical-based probing, which can be used for the reproducible and accurate immobilization of biomolecules as well as for the determination of the surface reactivity allowing the assessment of surface reaction kinetics as well as identifying the bioactive sites. We want to give here a complete portrait of the advantages and use of SECM in the field of DNA microarrays. The potential of SECM for forming DNA microspot arrays on gold thin films as well as on boron doped diamond together with sensitive detection of hybridization events at these DNA microarrays will be shown. The patterning process is based on the local electropolymerization of a conducting polymer, polypyrrole, bearing an oligonucleotide unit. Our recent work on the use of electrochemical SNOM (Scanning near field optical microscopy) in this field will be discussed.